By Xusheng Wang, Canadian Solar Inc., Suzhou, China; Jian Wu, Canadian Solar Inc., Suzhou, China
The passivated emitter and rear contact (PERC) cell design is gaining acceptance in solar cell manufacturing because of its potential for high efficiency with p-type wafers and its easy integration into existing production lines. In terms of PERC mass production, an effective and reliable AlOx deposition tool is the most important aspect that needs to be considered. Light-induced degradation (LID) is a cell efficiency bottleneck because of bulk recombination, even if the silicon surface is well passivated. This paper examines the combination of cell efficiency, AlOx tool choice and LID regeneration as a route to industrializing PERC technology
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