Ion implantation for silicon solar cells

Published: November 30, 2012

By Henry Hieslmair, Principal Solar Scientist, Intevac; Ian Latchford, Senior Director of Solar Product Marketing, Intevac; Lisa Mandrell, Senior Process Manager, Intevac; Moon Chun, Director of Technology, Intevac; Babak Adibi, VP and GM of the Solar Implant Group, Intevac

This paper presents the background and technology development of the use of ion implantation technology in today’s crystalline silicon solar cell manufacturing lines. The recent history of ion implantation development and commercialization is summarized, and an explanation is given for the cell efficiency improvements realized using the technique on p-type mono-crystalline cells. The potential economic impact on the factory is also discussed.

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